Practical Feedback Controller Design for Micro-Displacement Positioning in Table Drive Systems

نویسندگان

  • Wataru Maebashi
  • Kazuaki Ito
  • Makoto Iwasaki
چکیده

This paper presents a practical feedback controller design of a ball screw-driven table system for the microdisplacement positioning. Friction of the mechanism in the micro-displacement region has nonlinear elastic properties, unlike Coulomb and/or viscous friction in the macro-displacement, resulting in different positioning responses and frequency characteristics of the plant depending on the regions. In this paper, at first, a numerical simulator with a rolling friction model is adopted to reproduce the positioning behaviors in the micro-displacement region. Based on the simulator, the stability condition of positioning in the region is clarified on the basis of frequency characteristics and, then, appropriate parameters of feedback controller are practically designed to satisfy the required positioning performance. Effectiveness of the proposed design has been verified by a series of experiments using a prototype of ball screw-driven table positioning device.

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تاریخ انتشار 2013